✦ LIBER ✦
Evolution of SiGe nanoclusters and micro defects in the Si1−xGex layer fabricated by two-step ion implantation and subsequent thermal annealing
✍ Scribed by Wenting Xu; Hailing Tu; Qinghua Xiao; Qing Chang; Zongfeng Li; Dali Liu
- Book ID
- 116244408
- Publisher
- Elsevier Science
- Year
- 2011
- Tongue
- English
- Weight
- 869 KB
- Volume
- 257
- Category
- Article
- ISSN
- 0169-4332
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