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Formation of amorphous micro-outgrowths during the chemical vapour deposition of boron

✍ Scribed by Jan-Otto Carlsson

Book ID
103789804
Publisher
Elsevier Science
Year
1981
Weight
880 KB
Volume
12
Category
Article
ISSN
0376-4583

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Parametric study of the chemical vapour
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The influence of various parameters controlling the chemical vapour deposition of carbon-boron-nitrogen mixtures has been studied using the experimental designs methodology which provides a valuable phenomenological approach for the initial study of complicated chemical systems. The gaseous precurso