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The bond structures and properties of chemically vapour deposited amorphous SiC

✍ Scribed by Young Jin Park; Young Wook Park; John S. Chun


Publisher
Elsevier Science
Year
1988
Tongue
English
Weight
359 KB
Volume
166
Category
Article
ISSN
0040-6090

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## Abstract The paper reports the results of a structural investigation of C.V.D. tantalum, which had been deposited on a silica substrate. Deposits at 1000Β°C were high impurity powders or flakes, at 1100Β°C (normal deposition temperature) foil‐like, these containing much lower silicon contents, bei