✦ LIBER ✦
Erosion behaviour of physically vapour-deposited and chemically vapour-deposited SiC films coated on molybdenum during oxygenated argon beam thinning
✍ Scribed by T. Shikama; M. Kitajima; M. Fukutomi; M. Okada
- Publisher
- Elsevier Science
- Year
- 1984
- Tongue
- English
- Weight
- 667 KB
- Volume
- 117
- Category
- Article
- ISSN
- 0040-6090
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