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Effect of UV irradiation of the film during plasma chemical vapour deposition

✍ Scribed by A.M Wróbel; G Czeremuszkin

Publisher: Elsevier Science
Year: 1992
Tongue: English
Weight: 689 KB
Volume: 216
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(92)90838-3

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