✦ LIBER ✦
Effect of mixing oxygen or diborane on the formation of amorphous carbon films from methane by r.f. plasma chemical vapour deposition
✍ Scribed by C.R. Aiyer; S.A. Gangal; K. Montasser; S. Morita; S. Hattori
- Publisher
- Elsevier Science
- Year
- 1988
- Tongue
- English
- Weight
- 221 KB
- Volume
- 163
- Category
- Article
- ISSN
- 0040-6090
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