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Formation and contact properties of titanium-silicided shallow junctions

✍ Scribed by Christine Dehm; Josef Gyulai; Heiner Ryssel

Publisher: Elsevier Science
Year: 1991
Tongue: English
Weight: 663 KB
Volume: 53
Category: Article
ISSN: 0169-4332
DOI: 10.1016/0169-4332(91)90280-w

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