In this article, we report on the laser-induced formation of both C49 and C54 TiSi 2 films with fine grains using Q-switched Nd : YAG laser irradiation from Ti/Si samples. The films formed were characterized with micro-Raman spectroscopy, high-resolution transmission electron microscopy, energy-disp
β¦ LIBER β¦
Formation of titanium silicides and their refractive index measurements
β Scribed by Kuen Lee; Juh Tzeng Lue
- Publisher
- Elsevier Science
- Year
- 1987
- Tongue
- English
- Weight
- 353 KB
- Volume
- 125
- Category
- Article
- ISSN
- 0375-9601
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