✦ LIBER ✦
Mo-silicided shallow junctions formed by using the ITM technique and the influence of Mo recoil atoms
✍ Scribed by T. Gessner; M. Rennau; S. Schubert; E. Vetter
- Publisher
- Elsevier Science
- Year
- 1989
- Tongue
- English
- Weight
- 321 KB
- Volume
- 38
- Category
- Article
- ISSN
- 0169-4332
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