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Film growth model of atomic layer deposition for multicomponent thin films

✍ Scribed by Kim, Jin-Hyock; Kim, Ja-Yong; Kang, Sang-Won

Book ID: 121363232
Publisher: American Institute of Physics
Year: 2005
Tongue: English
Weight: 405 KB
Volume: 97
Category: Article
ISSN: 0021-8979
DOI: 10.1063/1.1883728

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