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Kinetic modeling of film growth rates of TiN films in atomic layer deposition

✍ Scribed by Lim, Jung-Wook; Park, Jin-Seong; Kang, Sang-Won

Book ID: 120306081
Publisher: American Institute of Physics
Year: 2000
Tongue: English
Weight: 359 KB
Volume: 87
Category: Article
ISSN: 0021-8979
DOI: 10.1063/1.373116

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