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Atomic Stacking Configurations in Atomic Layer Deposited TiN Films

✍ Scribed by Li, Sean; Dong, Z. L.; Lim, B. K.; Liang, M. H.; Sun, C. Q.; Gao, W.; Park, H. S.; White, T.

Book ID: 126289476
Publisher: American Chemical Society
Year: 2002
Tongue: English
Weight: 411 KB
Volume: 106
Category: Article
ISSN: 0022-3654
DOI: 10.1021/jp026814e

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