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Atomic Layer Deposition of Platinum Thin Films

✍ Scribed by Aaltonen, Titta; Ritala, Mikko; Sajavaara, Timo; Keinonen, Juhani; Leskelä, Markku

Book ID: 118749488
Publisher: American Chemical Society
Year: 2003
Tongue: English
Weight: 230 KB
Volume: 15
Category: Article
ISSN: 0897-4756
DOI: 10.1021/cm021333t

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## Abstract Presented in this paper is a study of the biocompatibility of an atomic layer‐deposited (ALD) alumina (Al~2~O~3~) thin film and an ALD hydrophobic coating on standard glass cover slips. The pure ALD alumina coating exhibited a water contact angle of 55° ± 5° attributed, in part, to a hi