✦ LIBER ✦

Atomic layer deposition of PbZrO3 thin films

✍ Scribed by Jenni Harjuoja; Samuli Väyrynen; Matti Putkonen; Lauri Niinistö; Eero Rauhala

Book ID: 103818653
Publisher: Elsevier Science
Year: 2007
Tongue: English
Weight: 302 KB
Volume: 253
Category: Article
ISSN: 0169-4332
DOI: 10.1016/j.apsusc.2006.11.041

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Atomic Layer Deposition of Titanium Disu

Atomic Layer Deposition of Titanium Disulfide Thin Films

✍ V. Pore; M. Ritala; M. Leskelä 📂 Article 📅 2007 🏛 John Wiley and Sons 🌐 English ⚖ 634 KB

Atomic Layer Deposition of Tin Monosulfi

Atomic Layer Deposition of Tin Monosulfide Thin Films

✍ Prasert Sinsermsuksakul; Jaeyeong Heo; Wontae Noh; Adam S. Hock; Roy G. Gordon 📂 Article 📅 2011 🏛 John Wiley and Sons 🌐 English ⚖ 688 KB

Ruthenium Thin Films Grown by Atomic Lay

Ruthenium Thin Films Grown by Atomic Layer Deposition

✍ T. Aaltonen; P. Alén; M. Ritala; M. Leskelä 📂 Article 📅 2003 🏛 John Wiley and Sons 🌐 English ⚖ 250 KB 👁 1 views

Growth of Fe2O3 thin films by atomic lay

Growth of Fe2O3 thin films by atomic layer deposition

✍ M. Lie; H. Fjellvåg; A. Kjekshus 📂 Article 📅 2005 🏛 Elsevier Science 🌐 English ⚖ 392 KB

Biocompatibility of atomic layer-deposit

Biocompatibility of atomic layer-deposited alumina thin films

✍ Dudley S. Finch; Tammy Oreskovic; Krishna Ramadurai; Cari F. Herrmann; Steven M. 📂 Article 📅 2008 🏛 John Wiley and Sons 🌐 English ⚖ 256 KB 👁 1 views

## Abstract Presented in this paper is a study of the biocompatibility of an atomic layer‐deposited (ALD) alumina (Al~2~O~3~) thin film and an ALD hydrophobic coating on standard glass cover slips. The pure ALD alumina coating exhibited a water contact angle of 55° ± 5° attributed, in part, to a hi

Laser-Assisted Atomic Layer Deposition o

Laser-Assisted Atomic Layer Deposition of Boron Nitride Thin Films

✍ J. Olander; L. M. Ottosson; P. Heszler; J.-O. Carlsson; K. M. E. Larsson 📂 Article 📅 2005 🏛 John Wiley and Sons 🌐 English ⚖ 486 KB