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Growth of conductive copper sulfide thin films by atomic layer deposition

✍ Scribed by Johansson, Johanna; Kostamo, Juhana; Karppinen, Maarit; Niinistö, Lauri

Book ID: 120527578
Publisher: Royal Society of Chemistry
Year: 2002
Tongue: English
Weight: 161 KB
Volume: 12
Category: Article
ISSN: 0959-9428
DOI: 10.1039/b105901g

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