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Atomic layer deposition of LixTiyOz thin films

✍ Scribed by Miikkulainen, Ville ;Nilsen, Ola ;Laitinen, Mikko ;Sajavaara, Timo ;Fjellvåg, Helmer

Book ID: 121085282
Publisher: The Royal Society of Chemistry
Year: 2013
Tongue: English
Weight: 585 KB
Volume: 3
Category: Article
ISSN: 2046-2069
DOI: 10.1039/C3RA40745D

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