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Film growth and relationship between microstructure and mechanical properties of a-C:H:F films deposited by PECVD

โœ Scribed by Freire, F.L; Maia da Costa, M.E.H; Jacobsohn, L.G; Franceschini, D.F

Book ID
120176543
Publisher
Elsevier Science
Year
2001
Tongue
English
Weight
133 KB
Volume
10
Category
Article
ISSN
0925-9635

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