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Structural and mechanical properties of a-C:H thin films grown by RF-PECVD

✍ Scribed by Tomasella, E; Thomas, L; Dubois, M; Meunier, C

Book ID
121897727
Publisher
Elsevier Science
Year
2004
Tongue
English
Weight
171 KB
Volume
13
Category
Article
ISSN
0925-9635

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