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Mid-frequency PECVD of a-SiCN:H films and their structural, mechanical and electrical properties

✍ Scribed by Peter, S.; Günther, M.; Berg, S.; Clausner, A.; Richter, F.


Book ID
120006865
Publisher
Elsevier Science
Year
2013
Tongue
English
Weight
755 KB
Volume
90
Category
Article
ISSN
0042-207X

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