Structural, optical and electrical properties of helium diluted a-Si1−xCx:H films deposited by PECVD
✍ Scribed by M. Loulou; R. Gharbi; M.A. Fathallah; G. Ambrosone; U. Coscia; G. Abbate; A. Marino; S. Ferrero; E. Tresso
- Book ID
- 116669079
- Publisher
- Elsevier Science
- Year
- 2006
- Tongue
- English
- Weight
- 271 KB
- Volume
- 352
- Category
- Article
- ISSN
- 0022-3093
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