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A study on structural and electrical properties of low dielectric constant SiOC(–H) thin films deposited via PECVD

✍ Scribed by R. Navamathavan; R. Nirmala; Chang Young Kim; Cheul-Ro Lee; Chi Kyu Choi


Book ID
113743577
Publisher
Elsevier Science
Year
2012
Tongue
English
Weight
546 KB
Volume
73
Category
Article
ISSN
0022-3697

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