✦ LIBER ✦
UV irradiation effects on the bonding structure and electrical properties of ultra low-k SiOC(–H) thin films for 45 nm technology node
✍ Scribed by Chi Kyu Choi; Chang Young Kim; R. Navamathavan; Heang Seuk Lee; Jong-Kwan Woo; Myung Taek Hyun; Heon Ju Lee; Won Young Jeung
- Book ID
- 113514100
- Publisher
- Elsevier Science
- Year
- 2011
- Tongue
- English
- Weight
- 766 KB
- Volume
- 11
- Category
- Article
- ISSN
- 1567-1739
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