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Correlations between deposition parameters, mechanical properties, and microstructure for diamond-like carbon films synthesized by RF-PECVD

✍ Scribed by Hsu, Jiong-Shiun; Tzeng, Shinn-Shyong; Kuo, Chih-Ming; Wu, Ying-Jie

Book ID: 120509533
Publisher: Chinese Electronic Periodical Services
Year: 2013
Tongue: English
Weight: 896 KB
Volume: 36
Category: Article
ISSN: 0253-3839
DOI: 10.1080/02533839.2012.727639

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