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Effect of positive pulses on the microstructure and mechanical properties of diamond-like carbon films deposited by PBII

✍ Scribed by Junho Choi; Soji Miyagawa; Setsuo Nakao; Masami Ikeyama; Yoshiko Miyagawa

Publisher: Elsevier Science
Year: 2006
Tongue: English
Weight: 93 KB
Volume: 242
Category: Article
ISSN: 0168-583X
DOI: 10.1016/j.nimb.2005.08.113

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