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Raman Characterization and Mechanical Properties of the Silicon Nitride/Diamond-Like Carbon Composites Film Prepared by Co-Deposition of RF Magnetron and Filter Cathodic Arc

✍ Scribed by P. Bunnak; P. Limsuwan

Book ID: 119357492
Publisher: Elsevier
Year: 2012
Tongue: English
Weight: 482 KB
Volume: 32
Category: Article
ISSN: 1877-7058
DOI: 10.1016/j.proeng.2012.02.031

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