Chemical Bonding in Composite SiN x /Diamond-Like Carbon Films Prepared by Filter Cathodic Arc Deposition of Graphite Incorporated with Radio Frequency Sputtering of Silicon Nitride

✍ Scribed by Bunnak, Phuwanai; Gong, Yongping; Limsuwan, Supanee; Pokaipisit, Artorn; Limsuwan, Pichet

• Book ID: 121440144
• Publisher: Institute of Pure and Applied Physics
• Year: 2013
• Tongue: English
• Weight: 613 KB
• Volume: 52
• Category: Article
• ISSN: 0021-4922
• DOI: 10.7567/JJAP.52.095501