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Fabrication of luminescent nanostructures by electron-beam direct writing of PMMA resist

✍ Scribed by C.A. Barrios; S. Carrasco; V. Canalejas-Tejero; D. López-Romero; F. Navarro-Villoslada; M.C. Moreno-Bondi; J.L.G. Fierro; M.C. Capel-Sánchez


Book ID
116731043
Publisher
Elsevier Science
Year
2012
Tongue
English
Weight
508 KB
Volume
88
Category
Article
ISSN
0167-577X

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## Abstract Optical waveguides based on benzocyclobutene polymer are fabricated by electron‐beam direct writing without etching. The propagation losses of waveguide measured at 1.55 μm for both TE and TM polarizations are 0.76 and 0.86 dB/cm, respectively. Moreover, the characteristics of waveguide