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Successive development optimization of resist kinoforms manufactured with direct-writing, electron-beam lithography

✍ Scribed by Larsson, Michael ;Ekberg, Mats ;Nikolajeff, Fredrik ;Hård, Sverker

Book ID: 115343262
Publisher: The Optical Society
Year: 1994
Tongue: English
Weight: 529 KB
Volume: 33
Category: Article
ISSN: 1559-128X
DOI: 10.1364/AO.33.001176

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