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Direct Writing of Patterned Ceramics Using Electron-Beam Lithography and Metallopolymer Resists

✍ Scribed by S. B. Clendenning; S. Aouba; M. S. Rayat; D. Grozea; J. B. Sorge; P. M. Brodersen; R. N. S. Sodhi; Z.-H. Lu; C. M. Yip; M. R. Freeman; H. E. Ruda; I. Manners

Publisher
John Wiley and Sons
Year
2004
Tongue
English
Weight
263 KB
Volume
16
Category
Article
ISSN
0935-9648

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