Proximity-compensated blazed transmission grating manufacture with direct-writing, electron-beam lithography

✍ Scribed by Ekberg, M. ;Nikolajeff, F. ;Larsson, M. ;Hård, S.

• Book ID: 115343179
• Publisher: The Optical Society
• Year: 1994
• Tongue: English
• Weight: 610 KB
• Volume: 33
• Category: Article
• ISSN: 1559-128X
• DOI: 10.1364/AO.33.000103