𝔖 Bobbio Scriptorium
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Computer-generated holograms fabricated by direct write of positive electron-beam resist

✍ Scribed by Urquhart, Kristopher S.; Stein, Robert; Lee, Sing H.

Book ID
115419473
Publisher
Optical Society of America
Year
1993
Tongue
English
Weight
482 KB
Volume
18
Category
Article
ISSN
0146-9592

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## Abstract Optical waveguides based on benzocyclobutene polymer are fabricated by electron‐beam direct writing without etching. The propagation losses of waveguide measured at 1.55 ΞΌm for both TE and TM polarizations are 0.76 and 0.86 dB/cm, respectively. Moreover, the characteristics of waveguide