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Fabrication of submicron microwave bipolar transistors by direct write electron beam lithography

✍ Scribed by M.N. Webster; A.H. Verbruggen; J. Romijn; H.F.F. Jos; P.M.A. Moors; S. Radelaar

Publisher: Elsevier Science
Year: 1992
Tongue: English
Weight: 349 KB
Volume: 19
Category: Article
ISSN: 0167-9317
DOI: 10.1016/0167-9317(92)90534-x

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