✦ LIBER ✦
Patterning of a Ti/Pt/Au metallization for submicron bipolar transistors made by direct write e-beam lithography
✍ Scribed by M.N. Webster; A.H. Verbruggen; H.F.F. Jos; J. Romijn; P.M.A. Moors; S. Radelaar
- Publisher
- Elsevier Science
- Year
- 1993
- Tongue
- English
- Weight
- 417 KB
- Volume
- 21
- Category
- Article
- ISSN
- 0167-9317
No coin nor oath required. For personal study only.