Characterization of benzocyclobutene optical waveguides fabricated by electron-beam direct writing
โ Scribed by Chih-Wei Hsu; Hsuen-Li Chen; Wen-Chi Chao; Way-Seen Wang
- Publisher
- John Wiley and Sons
- Year
- 2004
- Tongue
- English
- Weight
- 86 KB
- Volume
- 42
- Category
- Article
- ISSN
- 0895-2477
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โฆ Synopsis
Abstract
Optical waveguides based on benzocyclobutene polymer are fabricated by electronโbeam direct writing without etching. The propagation losses of waveguide measured at 1.55 ฮผm for both TE and TM polarizations are 0.76 and 0.86 dB/cm, respectively. Moreover, the characteristics of waveguide bends are discussed for comparison. ยฉ 2004 Wiley Periodicals, Inc. Microwave Opt Technol Lett 42: 208โ210, 2004; Published online in Wiley InterScience (www.interscience.wiley.com). DOI 10.1002/mop.20254
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