Design aspects for the fabrication of gratings for DFB-lasers by direct write electron-beam lithography

✍ Scribed by R. Steingrüber; M. Möhrle

• Publisher: Elsevier Science
• Year: 2005
• Tongue: English
• Weight: 186 KB
• Volume: 78-79
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/j.mee.2004.12.009