✦ LIBER ✦
Useful and cost efficient fabrication of dot arrays for photonic crystals by direct write electron-beam lithography
✍ Scribed by R. Steingrüber; S. Golka; H. Heidrich
- Book ID
- 114155509
- Publisher
- Elsevier Science
- Year
- 2003
- Tongue
- English
- Weight
- 431 KB
- Volume
- 67-68
- Category
- Article
- ISSN
- 0167-9317
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