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Fabrication of 22 nm T-gates for HEMT applications

✍ Scribed by S. Bentley; X. Li; D.A.J. Moran; I.G. Thayne

Book ID: 104051917
Publisher: Elsevier Science
Year: 2008
Tongue: English
Weight: 423 KB
Volume: 85
Category: Article
ISSN: 0167-9317
DOI: 10.1016/j.mee.2008.01.058

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