Fabrication of 160-nm T-gate metamorphic AlInAs/GaInAs HEMTs on GaAs substrates by metal organic chemical vapour deposition

✍ Scribed by Li, Hai-Ou; Huang, Wei; Tang, Chak Wah; Deng, Xiao-Fang; Lau, Kei May

• Book ID: 121370911
• Publisher: IOP Publishing
• Year: 2011
• Tongue: English
• Weight: 819 KB
• Volume: 20
• Category: Article
• ISSN: 1674-1056
• DOI: 10.1088/1674-1056/20/6/068502