Fabrication of 0.3-μm T-gate metamorphic AlInAs/GaInAs HEMTs on silicon substrates using metal organic chemical vapor deposition

✍ Scribed by HaiOu Li; Wei Huang; Qi Li; SiMin Li; Xi Jiang; ChakWah Tang; KeiMay Lau; TianWen Zhang

• Book ID: 118814465
• Publisher: Science in China Press (SCP)
• Year: 2012
• Tongue: English
• Weight: 713 KB
• Volume: 55
• Category: Article
• ISSN: 1672-1799
• DOI: 10.1007/s11433-012-4658-0