✦ LIBER ✦

Experimental measurement of in-depth secondary defects distribution produced by helium implantation in silicon

✍ Scribed by S. Daliento; L. Mele; P. Spirito; L. Gialanella; B.N. Limata; M. Romano

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Stability of defects created by high flu

✍ M.L. David; M.F. Beaufort; J.F. Barbot 📂 Article 📅 2004 🏛 Elsevier Science 🌐 English ⚖ 595 KB

Measurements of the depth distribution o

✍ H. Pattyn; J. Odeurs; E. Verbiest 📂 Article 📅 1980 🏛 Elsevier Science ⚖ 289 KB

Thermal evolution of defects produced by

✍ P.J. Simpson; A.P. Knights; M. Chicoine; K. Dudeck; O. Moutanabbir; S. Ruffell; 📂 Article 📅 2008 🏛 Elsevier Science 🌐 English ⚖ 860 KB

Determination of the depth distribution

✍ Song Kechang; J.-M. Baribeau; D.C. Houghton; J.A. Jackman 📂 Article 📅 1990 🏛 Elsevier Science 🌐 English ⚖ 415 KB

2110. Depth distribution and annealing o

📂 Article 📅 1976 🏛 Elsevier Science 🌐 English ⚖ 130 KB

Experimental method for measuring both a

✍ Masaya Iwaki; Kenji Gamo; Kohzo Masuda; Susumu Namba; Shinji Ishihara; Itsuro Ki 📂 Article 📅 1975 🏛 Elsevier Science ⚖ 436 KB