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Evaluation of thin MgF2 films by spectroscopic ellipsometry

✍ Scribed by N. Kaiser; A. Zuber; U. Kaiser


Book ID
107864334
Publisher
Elsevier Science
Year
1993
Tongue
English
Weight
151 KB
Volume
232
Category
Article
ISSN
0040-6090

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Spectroscopic ellipsometry measurements
✍ Tompkins, Harland G.; Tasic, Sonja; Baker, Jeff; Convey, Diana πŸ“‚ Article πŸ“… 2000 πŸ› John Wiley and Sons 🌐 English βš– 151 KB πŸ‘ 2 views

Optical methods are used to determine the thickness of thin metal films, with emphasis on spectroscopic ellipsometry and transmission. We discuss the conditions where this is possible and how to determine the optical constants for the material. The determination of the thickness of each of two metal