𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Characterization of Optical Thin Films by Spectroscopic Ellipsometry

✍ Scribed by Susan Trolier-McKinstry; Pong Chindaudom; Kuppuswami Vedam; Basavaraj V. Hiremath

Book ID
110826982
Publisher
John Wiley and Sons
Year
1995
Tongue
English
Weight
544 KB
Volume
78
Category
Article
ISSN
0002-7820

No coin nor oath required. For personal study only.

πŸ“œ SIMILAR VOLUMES

Optical Characterization of Silicon Oxyn
Optical Characterization of Silicon Oxynitride Thin Films by Variable Angle Spectroscopic Ellipsometry
✍ Yi-Ming Xiong; Paul G. Snyder; John A. Woollam; G. A. Al-Jumaily; F. J. Gagliard πŸ“‚ Article πŸ“… 1992 πŸ› John Wiley and Sons 🌐 English βš– 424 KB

## Abstract Silicon oxynitride (SiO~x~ N~y~) thin films were deposited on silicon substrates by ion‐assisted deposition. Variable angle spectroscopic ellipsometry (VASE) was used to optically characterize the deposited film properties, such as layer thickness and composition, film surface and inter