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Characterization of SiN thin films with spectroscopic ellipsometry

✍ Scribed by J. Petalas; S. Logothetidis; A. Markwitz; E.C. Paloura; R.L. Johnson; D. Fuchs

Book ID
103937538
Publisher
Elsevier Science
Year
1993
Tongue
English
Weight
490 KB
Volume
185
Category
Article
ISSN
0921-4526

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πŸ“œ SIMILAR VOLUMES

Spectroscopic ellipsometry measurements
Spectroscopic ellipsometry measurements of thin metal films
✍ Tompkins, Harland G.; Tasic, Sonja; Baker, Jeff; Convey, Diana πŸ“‚ Article πŸ“… 2000 πŸ› John Wiley and Sons 🌐 English βš– 151 KB πŸ‘ 2 views

Optical methods are used to determine the thickness of thin metal films, with emphasis on spectroscopic ellipsometry and transmission. We discuss the conditions where this is possible and how to determine the optical constants for the material. The determination of the thickness of each of two metal