Etching of CoFeB Using CO∕NH[sub 3] in an Inductively Coupled Plasma Etching System

✍ Scribed by Park, Jong-Yoon; Kang, Se-Koo; Jeon, Min-Hwan; Jhon, Myung S.; Yeom, Geun-Young

• Book ID: 127134456
• Publisher: The Electrochemical Society
• Year: 2011
• Tongue: English
• Weight: 456 KB
• Volume: 158
• Category: Article
• ISSN: 0013-4651
• DOI: 10.1149/1.3505295