✦ LIBER ✦
Parametric Study of NiFe and NiFeCo High Density Plasma Etching Using CO/NH[sub 3]
✍ Scribed by Jung, K. B.
- Book ID
- 127126147
- Publisher
- The Electrochemical Society
- Year
- 1999
- Tongue
- English
- Weight
- 601 KB
- Volume
- 146
- Category
- Article
- ISSN
- 0013-4651
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