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Etching and micro-optics fabrication in diamond using chlorine-based inductively-coupled plasma

โœ Scribed by Lee, C.L.; Gu, E.; Dawson, M.D.; Friel, I.; Scarsbrook, G.A.


Book ID
119993719
Publisher
Elsevier Science
Year
2008
Tongue
English
Weight
649 KB
Volume
17
Category
Article
ISSN
0925-9635

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