✦ LIBER ✦

Silicon etch process options for micro- and nanotechnology using inductively coupled plasmas

✍ Scribed by C.C. Welch; A.L. Goodyear; T. Wahlbrink; M.C. Lemme; T. Mollenhauer

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Study of dry etching for GaN and InGaN-b

✍ Chih-Chiang Kao; H.W Huang; J.Y Tsai; C.C Yu; C.F Lin; H.C Kuo; S.C Wang 📂 Article 📅 2004 🏛 Elsevier Science 🌐 English ⚖ 344 KB