Evaluation of halogenated polyimide etching for optical waveguide fabrication by using inductively coupled plasma

✍ Scribed by Kwansoo Han; Junghee Kim; Woo-Hyuk Jang

• Publisher: John Wiley and Sons
• Year: 2000
• Tongue: English
• Weight: 228 KB
• Volume: 79
• Category: Article
• ISSN: 0021-8995
• DOI: 10.1002/1097-4628(20010103)79:1<176::aid-app200>3.0.co;2-7