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Transfer of micro-optical structures into GaAs by use of inductively coupled plasma dry etching

✍ Scribed by Karlsson, Mikael ;Nikolajeff, Fredrik

Book ID: 115349785
Publisher: The Optical Society
Year: 2002
Tongue: English
Weight: 984 KB
Volume: 41
Category: Article
ISSN: 1559-128X
DOI: 10.1364/AO.41.000902

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