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Transfer of continuous-relief diffractive structures into diamond by use of inductively coupled plasma dry etching

✍ Scribed by Karlsson, Mikael; Hjort, Klas; Nikolajeff, Fredrik

Book ID: 115424976
Publisher: Optical Society of America
Year: 2001
Tongue: English
Weight: 173 KB
Volume: 26
Category: Article
ISSN: 0146-9592
DOI: 10.1364/OL.26.001752

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